Anodic Etching of III-V Compound Semiconductors
نویسندگان
چکیده
منابع مشابه
Dry Etching Technologies of Optical Device and III-V Compound Semiconductors
Dry etching is one of the elemental technologies for the fabrication of optical devices. In order to obtain the desired shape using the dry etching process, it is necessary to understand the reactivity of the materials being used to plasma. In particular, III-V compound semiconductors have a multi-layered structure comprising a plurality of elements and thus it is important to first have a full...
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ژورنال
عنوان ژورنال: Journal of The Surface Finishing Society of Japan
سال: 2018
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.69.633